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M. Kashiwagi's Books back

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Tungsten & Other Advanced Metals for VLSI-ULSI Applications V: Materials Research Society Conference Proceedings, VLSI-5, VLSI-V - G. Smith, Krishna Shenai, S. Wong, S. Furukawa, M. Kashiwagi, Y. Okuto, Carol McConica, R. Bluementhal, K. Saraswat
Tungsten & Other Advanced Metals for VLSI-ULSI Applications V: Materials Research Society Conference Proceedings, VLSI-5, VLSI-V
by G. Smith (author), Krishna Shenai (author), S. Furukawa (author), S. Wong (author), M. Kashiwagi (author), Y. Okuto (author), Carol McConica (author), R. Bluementhal (author), K. Saraswat (author)
publisher: Materials Research Society publish date: March 28th 1990
format: hardcover
language: English
ISBN: 1558990682 (9781558990685)
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