Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Prosenjit Rai-Choudhury, John Wood (Editor), P. Rai-Choudhury (Editor), A.J. Moses (Editor), J. Lin Burn (Introduction),Hardcover - Volume 1,Series: IEE Materials & Devices Series 12, English-language edition,Pub by SPIE Press
Prosenjit Rai-Choudhury, John Wood (Editor), P. Rai-Choudhury (Editor), A.J. Moses (Editor), J. Lin Burn (Introduction),Hardcover - Volume 1,Series: IEE Materials & Devices Series 12, English-language edition,Pub by SPIE Press
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Format: hardcover
ISBN:
9780819423788 (0819423785)
Publish date: March 14th 1997
Publisher: SPIE Publications
Pages no: 768
Edition language: English